Spatial Sensitivity of Silicon GAA Nanowire FETs under Line Edge Roughness Variations

Variability Study of Silicon Nanowire FETs

Yi-Bo Liao, Meng-Hsueh Chiang, Keunwoo Kim, and Wei-Chou Hsu Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan Department of Electronic Engineering, National Ilan University, I-Lan 260, Taiwan IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, USA E-mail: [email protected], Tel: +886-3-9357400 ext. 653, Fax: +886...

Ambipolar silicon nanowire FETs with stenciled-deposited metal gate

We report on a fully CMOS compatible fabrication method for ambipolar silicon nanowire FinFETs. The low thermal budget processing, compatible with monolithic 3D device integration, makes use of low pressure chemical vapor deposition (LPCVD) of amorphous Si (a-Si) and SiO2 layers as well as metal gate patterning using stencil lithography, demonstrated for the first time. FinFETs with stenciled A...

Effect of Nanowire-dielectric Interface on the Hysteresis of Solution Processed Silicon Nanowire FETs

Silicon nanowires (Si NW) are ideal candidates for low-cost solution processed field effect transistors (FETs) due to the ability of nanowires to be dispersed in solvents, and demonstrated high charge carrier mobility. The interface between the nanowire and the dielectric plays a crucial role in the FET characteristics, and can be responsible for unwanted effects such as current hysteresis duri...

Impact of Mask Roughness on Wafer Line-Edge Roughness

The influence of line-edge roughness (LER) of an optical photomask on the resulting printed wafer LER is investigated. The LER Transfer function (LTF) proposed by Naulleau and Gallatin, and later corrected by Tanabe, is shown to be a very useful tool for evaluating the low-pass filtering behavior of the imaging tool and its impact on the transfer of mask LER to the wafer. Highfrequency mask LER...

Theoretical Investigation of Surface Roughness Scattering in Silicon Nanowire Transistors